Mounaix, P. ; Arscott, S. ; David, T. ; Podevin, F. ; Mélique, X. ; Lippens, D. (2000) Microtechnologies for the monolithic fabrication of mm and submm non linear devices. In: Gallium Arsenide applications symposium. GAAS 2000, 2-6 october 2000, Paris.
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Abstract
We report on the recent development in microtechnology aimed at monolithically fabricating non linear devices at millimetre and submillimetre wavelengths. This approach will be illustrated with the fabrication of planar integrated Heterostructure Barrier Varactors and Schottky mixers for a use at 250 GHz and 500 GHz respectively. Also, epitaxial lift-off, followed by a transfer onto a host quartz substrate demonstrated here should permit us to further integrate the devices with the filtering and matching circuits in a monolithic fashion.
| Document type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Area 09 - Ingegneria industriale e dell'informazione > ING-INF/01 Elettronica |
| Depositato da: | CIB Staff |
| Depositato il: | 17 Jun 2004 |
| Last modified: | 16 May 2011 13:26 |
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