Tan, Guan-Leng ; Rebeiz, Gabriel M. (2000) Microwave Absorptive MEMS Switches. In: Gallium Arsenide applications symposium. GAAS 2000, 2-6 october 2000, Paris.
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Abstract
This paper describes the design and performance of a 30 GHz CPW SPST absorptive MEMS switch based on silicon surface micromachining technology.The MEMS switch is implemented using capacitive shun bridges with fixed-fixed beams.A return loss of better than 15 dB and an insertion loss of 0.8-1.0 dB is achieved in the up-state position.The return loss is better than 20 dB and the isolation is 25-30 dB at 30 GHz in the down-state position.Potential application areas include switch matrix communication systems.
| Document type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Area 09 - Ingegneria industriale e dell'informazione > ING-INF/01 Elettronica |
| Depositato da: | CIB Staff |
| Depositato il: | 17 Jun 2004 |
| Last modified: | 16 May 2011 13:26 |
Solo per lo Staff dell Archivio: Gestione del documento
