Vorobiev, A. ; Deleniv, A. ; Talanov, V. ; Gevorgian, S. (2002) A Simple Parallel-Plate Resonator Technique for Microwave. Characterization of Thin Resistive Films. In: Gallium Arsenide applications symposium. GAAS 2002, 23-27 september 2002, Milano.
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Abstract
A parallel-plate resonator method is proposed for non-destructive characterisation of resistive films used in microwave integrated circuits. A slot made in one of the plates is used to measure surface impedance of a reference film and film under test. The surface impedance of the film under test is extract from these two measurements using a simple procedure. X-band experimental verification is given for a number of resistive films.
| Document type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | Area 09 - Ingegneria industriale e dell'informazione > ING-INF/01 Elettronica |
| Depositato da: | CIB Staff |
| Depositato il: | 17 Jun 2004 |
| Last modified: | 16 May 2011 13:21 |
Solo per lo Staff dell Archivio: Gestione del documento
